Keyphrases
Selenium
100%
Migration Behavior
100%
Evolution Behavior
100%
Silicon Carbide
100%
Isothermal Annealing
100%
Implanted Silicon
100%
Structural Evolution
100%
Annealing Temperature
28%
Rutherford Backscattering Spectrometry
28%
Annealing Cycles
28%
Annealing
14%
Scanning Electron Microscopy
14%
Crystallinity
14%
Raman Spectroscopy
14%
Room Temperature
14%
Recrystallization
14%
Radiation Damage
14%
Implantation Temperature
14%
Morphological Changes
14%
Pre-exponential Factor
14%
Annealing Process
14%
Selenium Ions
14%
Enhanced Migration
14%
Diffusion Coefficient
14%
Annealing Studies
14%
Engineering
Isothermal Annealing
100%
Implanted Sample
75%
Annealing Temperature
50%
Crystallinity
25%
Room Temperature
25%
Broadening
25%
Radiation Effect
25%
Pre-Exponential Factor
25%
Diffusion Coefficient
25%
Annealing Process
25%
Material Science
Annealing
100%
Silicon Carbide
100%
Rutherford Backscattering Spectrometry
40%
Morphology
20%
Scanning Electron Microscopy
20%
Raman Spectroscopy
20%
Radiation Damage
20%
Diffusivity
20%
Earth and Planetary Sciences
Silicon Carbide
100%
Backscattering
40%
Spectroscopy
40%
Fluence
20%
Scanning Electron Microscopy
20%
Crystallinity
20%
Morphology
20%
Room Temperature
20%
Radiation Effect
20%